High-performance liquid chromatographic method of photoactive compounds based on diazonaphthoquinone for positive photoresists.

An analytical method for the compositional and quantitative analysis of photoactive compounds (PACs) in positive photoresist (Posi PR) has been developed by high-performance liquid chromatography (HPLC). Under optimum HPLC conditions, various types of PACs consisting of a mixture of isomers were satisfactorily separated with no interference. This method was applied to the quantitative analysis of PACs in Posi PR. All correlation coefficients were better than or equal to 0.998. The precision and accuracy showed no significant deviation and were measured with acceptable values. The intra-batch precision and accuracy (%) of quality control samples ranged from 0.80 to 1.46% and from 101.7 to 102.8%. Consequently, the method was demonstrated to be acceptable for the analysis of PACs in Posi PR. We believe that the HPLC method developed in this work can be used for the compositional and quantitative analysis of PACs in Posi PR.